Multi-Stage Process Control

  • Target changer control systems
  • Beam pattern manipulation and focus
  • Dose measurement
  • Target thermal management
  • Vacuum and Fluidics system control
  • Vacuum stage motion control
  • Multi-Stage Industrial Deposition
  • Complete system control including 6-axis and conveyor robotics, UV treatment, chemical delivery, IR treatment, vibration control and plasma treatment
  • Automated control and safety systems